Fast, Precise 3D Surface Measurements
The ZeroTouch® 5000 Series sensor evaluates several thousand surface profiles using advanced white-light interferometry technology to capture high-speed, precision data acquisition and real-time 3D surface roughness measurements. Using high-resolution cameras, the sensor provides highly significant results without the limits of tactile measuring systems.
Features & Benefits
- Non-contact measurements of smooth, rough, and specular surfaces such as glass, metal, plastic, and composites
- Precise measurement of height and relevant surface parameters
- Installed in the immediate vicinity of the production line
- Inspects mirrors, semiconductor wafers, microlenses, and solar cells
- Micron-level, fast measurements of various surface profiles
- 3D sensor with manually interchangeable objective
- White-light interferometry-based, high-resolution 5 MP sensor
- Piezo positioning system with interferometric calibrated closed-loop controller (up to 100µm scan range)
- Optional XY positioning table with manual Z adjustment
- Advanced algorithms improve speed and reduce system noise
Technical Data
| Scan Range | Up to 100 μm |
| Positioning Area | 100 x 100 mm2 |