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Home | Products | ZTS 1000 Series

ZTS 1000 Series

A non-contact surface profiling sensor that generates a 3D point cloud of micro-geometries

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Fast, Precise 3D Surface Measurements
The ZeroTouch® 1000 Series sensor evaluates several thousand surface profiles using advanced white-light interferometry technology to capture high-speed, precision data acquisition and real-time 3D surface roughness measurements. Using high-resolution cameras, the sensor provides highly significant results without the limits of tactile measuring systems.

Features & Benefits

  • Non-contact measurements of smooth, rough, and specular surfaces such as glass, metal, plastic, and composites
  • Precise measurement of height and relevant surface parameters
  • Installed in the immediate vicinity of the production line
  • Inspects mirrors, semiconductor wafers, microlenses, and solar cells
  • Micron-level, fast measurements of various surface profiles
  • 3D sensor with manually interchangeable objective
  • White-light interferometry-based, very high-resolution sensors (5 MP and 2.3 MP)
  • Piezo positioning system with interferometric calibrated closed-loop controller (up to 5,000µm scan range)
  • Optional XY positioning table with manual Z adjustment
  • Advanced algorithms improve speed and reduce system noise

Technical Data

Scan RangeUp to 5,00 μm
Positioning Area100 x 100 mm2
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774-847-9869

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