SURFCOM NEX 001
- Best-in-class residual noise (Rz 0) thanks to a low-vibration linear drive
- Resolution of up to 0.1 nm at 6.4 µm range and 20 nm at the 1,000 µm range
- With the optional tracing driver tilting unit it is possible to manually tilt the tracing driver +/-5 degrees
Technical Data
| X/C | Measuring Range Z for Roughness | Resolution Roughness | Accuracy Z | Straighness X |
|---|---|---|---|---|
| 100/250 200/250 100/450 200/450 100/650 200/650 | max. 1000µm max. 1000µm max. 1000µm max. 1000µm max. 1000µm max. 1000µm | min. 0.1nm min. 0.1nm min. 0.1nm min. 0.1nm min. 0.1nm min. 0.1nm | +/- 2% on 20µm periode +/- 2% on 20µm periode +/- 2% on 20µm periode +/- 2% on 20µm periode +/- 2% on 20µm periode +/- 2% on 20µm periode | 0.05+L/1000µm 0.05+L/1000µm 0.05+L/1000µm 0.05+L/1000µm 0.05+L/1000µm 0.05+L/1000µm |