XYZ Travel
MicroLine 1000: 100 x 100 x 175 mm
MicroLine 2000: 200 x 200 x 175 mm
MicroLine 3000: 300 x 300 x 145 mm
HIGH-PERFORMANCE CRITICAL DIMENSIONAL MEASUREMENT SYSTEM
The VIEW MicroLine® is a high-performance critical dimensional measurement system for wafers, masks, MEMS and other micro-fabricated devices in situations which do not require fully automated operation.
MicroLine systems feature the highest quality microscope optics, motorized autofocus, manually operated stages and fully programmable illumination and measurement recipes. Reflected illumination is standard and transmitted illumination is available as an option. MicroLine systems are capable of measuring bright and dark lines, semi-transparent layers, lines with irregular edges and other critical features.
Technical Data
| Standard | Optional | |
|---|---|---|
| XYZ Travel (mm) | MicroLine 1000: 100 x 100 x 175 mm MicroLine 2000: 200 x 200 x 175 mm MicroLine 3000: 300 x 300 x 145 mm | |
| Metrology Camera | 2.0 megapixel, digital, B&W metrology camera | 1.4 megapixel, 2/3 inch, digital, monochrome Color and other camera configurations available upon request |
| XY Stage | Cross roller with manual coaxial positioning and quick release; Glass stage insert for use with transmitted light | |
| Objective Lenses (Field Interchangable) | 10X Bright Field 50X Bright Field | 5X BF or BF/DF 10X BF or BF/DF 20X LWD, BF or BF/DF 100X LWD, BF or BF/DF 150X LWD, BF or BF/DF |
| Imaging Optics | Olympus Microscope optics, including horizontal bright field/dark field illuminator, five-objective motorized lens turret with DIC slot, tilt trinocular viewing system with optical crosshair, and standard 0.63X back tube with camera mount | |
| Illumination | Green LED coaxial surface light and LED transmitted substage light, programmable for source and intensity | White LED coaxial surface light and color filters |